Devices for detecting and measuring small particles

Thema:
Metrology

Modern technologies are used to measure and maintain microscopic surfaces, and keep them free of dirt. We measure defects with scanning probe microscopy and detect the smallest particles with our special scanner, the Rapid Nano.

Detecting small particles

In chip manufacture, it’s important that no particles end up on chips. Even the tiniest particle can make the product unusable. We therefore have a way of detecting 50-nanometre-sized particles using our special scanner, the Rapid Nano. This enables us to assess which working methods are as clean as possible and how they can be improved.

The Rapid Nano

The Rapid Nano is a relatively affordable tool that scans the complete reflective surface (e.g., EUV masks) in a shielded clean box. This is done at a speed of 100 cm2 per hour. The solution can then be integrated into the client’s process.

Rapid Nano Particle Scanner

The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates.

Download the leaflet (pdf, 191 kB)

Fast and detailed

According to the latest standards, during the production process, semiconductor devices must not add more than one 50-nanometre particle per 10 cycles to a 15 x 15 cm mask. You can compare this with flying over the Netherlands in a fighter jet, looking for a tennis ball. And you want to have the results within a few hours. This calls for a fast and detailed method.

Know-how at TNO

We’ve been a leader in the field of particle detection for 10 years. We devise methods for reliably detecting and locating defects using our knowledge of optics, signal processing, vacuum technology, and ultra-clean handling.

Get inspired

18 resultaten, getoond 6 t/m 10

From #plasticfree to future-proof plastics

Informatietype:
Webinar
15 June 2023
1 episode
On June 5th, we co-hosted a webinar with Fraunhofer UMSICHT, 'From plastic-free to future-proof plastics', where we shared insights from our whitepaper 'How a future-proof, circular and sustainable plastics economy should look like'.
Read more
over From #plasticfree to future-proof plastics

Personalised Health: From science to market

Informatietype:
Webinar
14 April 2023
0 episodes
Read more
over Personalised Health: From science to market

Switch to the hybrid energy system

Informatietype:
Webinar
17 February 2023
1 episode
Read more
over Switch to the hybrid energy system

Offshore wind under pressure

Informatietype:
Webinar
31 December 2022
1 episode
Read more
over Offshore wind under pressure

SEWGS: revolutionary CO2-reduction technology

Informatietype:
Webinar
20 December 2022
1 episode
Read more
over SEWGS: revolutionary CO2-reduction technology