High-end Optics Manufacturing

TNO's ultra-precise diamond turning lathes are able to machine both spherical, aspherical and freeform optical components into non-ferrous metals, crystals, polymers using diamonds. Our suite of machining processes include on-axis and off-axis diamond turning, flycutting and raster flycutting, 3D freeform slow tool servo, fast tool servo, grooving (lattices, gratings) and micro milling with Levricon highspeed spindle. We use these in combination with Magneto Rheological Finishing (MRF) resulting in ultra-low roughness and shape error.

Using different types of freeform metrology we measure the surface quality; the metrology data is fed back to SPDT and MRF processes to close the loop of machining and measuring. This results in freeform mirror components with maximum diameter of 600 mm, surface form error below 10 nanometer (RMSi) and roughness below 1 nanometer (Sq) .

TNO Optics Manufacturing specializes in the development of application specific optical coatings. We routinely develop coatings that have specific requirements on reflection or transmission in various spectral bands, ranging from ultraviolet to short wave infrared. We provide you with solutions for optical coatings: from advice on feasibility in the concept phase of an instrument, to the design, development, qualification and production of the coatings. For this purpose we are equipped with three state-of-the-art e-beam evaporation systems and we have in-house facilities for testing and inspection according to the relevant ISO standards.

Freeform optics are applied more and more, because the functions of a set of conventional (spherical) components can be combined in a single freeform. At present we focus on developing freeform mirrors, including coatings.

The mechanical, thermal and dynamical aspects like mounting references, light weighting and thermal stability, are taken into account using integrated design and manufacturing processes. Standard coatings for UV, visible, and infrared can be produced, and we develop and qualify dedicated coatings for special requirements. For the production of glass components we cooperate with specialized partners from around the world. The final finishing of glass components can be done by using our MRF equipment.