Hitachi SEM SU-70

The Hitachi SU70 is a so-called Schottky FEG Scanning Electron Microscope. It is primarily used with materials science research. The electron source also allows non-conductive materials, such as alumina, to be examined to a resolution of about 3nm without applying a conductive layer. Such a layer covers small surface details.

In combination with ion milling, thin layers as small as 3-4nm can be characterised.

By using a so-called top detector, back-scatter electron images at low acceleration voltages (e.g. 2kV) can be made. This improves characterisation of surfaces.

Sample size, maximum: round 150mm and up to 25mm high

Sample tilt (for EBSD) up to 70°

Field-free lens mode for EBSD

Tilt: -10°/+70°

Deceleration mode: for very low landing energy for research on beam-sensitive or poorly conductive materials

Semi-inlens mode with Super ExB filter

BSE detector with 5 segments, allowing the creation of a BSE-3D image.

Resolution: better than 0.9nm at 30keV, 1.6nm at 1keV under optimal conditions.

Accelerator voltage from 0.1keV with nm resolution

EDS element analysis from Bore (B)

High vacuum

High and very low beam currents, for optimal choice between surface examination at high resolution and material analysis

EDS, Energy Dispersive Spectral Element Analysis

WDS, Wavelength Dispersive Spectral Element Analysis

EBSD, Electon Beam Scattering Diffraction

BSE, Back Scatter Electron

Examples of applications:

Research catalysts and electrolysers

Damage assessment

Material analyses, chemical composition

PMI (Positive Material Identification)

Texture research

Crystallography

Corrosion testing

Tribology and wear testing

Surface examination of non-conductive materials such as aluminium oxide

For other applications, feel free to ask a question